A major hurdle for many nanotechnology and microelectromechanical systems (MEMS) device manufacturers is to find a lithography solution that meets both technology and production requirements. Because the requirements and types of devices vary greatly, lithography equipment manufacturers must be able to meet a wide range of technical production and cost challenges.

Ultratech’s 1X lithography systems offer advantages in product performance in the nanotechnology manufacturing industry. Ultratech provides a selection of 1X systems with the resolution, depth of focus, alignment and substrate handling capabilities to meet a large range of lithography needs for the nanotechnology industry.

Ultratech systems have been specifically designed for a wide range of nanotechnology applications including: automotive MEMS (accelerometers, pressure sensors, micro-gyroscopes) thin-film heads (TFHs), high brightness LEDs, laser diodes, inkjet print heads, rate sensors, microactuators, optical switches and biochips/microarrays.

Nanotechnology Products
NanoTech 160
NanoTech 190
UltraMet 100