Ultratech
pioneered mix-and-match lithography in response to the spiraling
cost of photolithography equipment. By leveraging this experience,
Ultratech is unique in its ability to mix-and-match with virtually
any vendor's lithography tools. The company also offers such features
as a pattern recognition-based alignment system, SECS and GEM communication,
host control, and full-track interface capability for easy integration
into modern fabs.
Conventional Lithography
Ultratech's steppers are also prevalent in lithography situations
where just one type of stepper processes all the device layers. 1X
lithography is often utilized in the fabrication of low-cost integrated
circuits in mature markets, including logic, power and communication
chips used in consumer products.
Semiconductor Products
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